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http://hdl.handle.net/1947/3799
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| Title: | A review of some current research in microelectromechanical systems (MEMS) with defence applications |
| Report number: | DSTO-GD-0316 |
| AR number: | AR-012-138 |
| Classification: | UNCLASSIFIED |
| Report type: | General Document |
| Authors: | White, A. |
| Issue Date: | 2002-02 |
| Division: | Weapons Systems Division |
| Abbreviation: | WSD |
| Release authority: | Chief, Weapons Systems Division |
| Release limitations: | PUBLIC RELEASE |
| Announce limitations: | Public Announce |
| Task sponsor: | Director - Ordnance Safety Group |
| Task number: | JNT 00/020 |
| File number: | 9505/19/262 |
| Pages or format: | 68 |
| References: | 354 |
| DSTORL/DEFTEST terms: | Military applications
Miniature electronic equipment
Microelectronics |
| Other descriptors: | MEMS (Microelectromechanical systems)
Microelectronics--Research |
| Abstract: | This reviews reviews some research in microelectromechanical systems (MEMS) published during the period 1999-2000. Research in defence applications of MEMS or MEMS research with potential applications for the Australian Defence Organisation are also discussed. |
| Executive summary: | A microelectromechanical system (MEMS) is one that is small (micro-scale) and is a system composed of both micromechanical components (such as microgears, microlevers, etc), which move to perform certain tasks, and microelectronic components to control that motion or to obtain information from that motion. However, MEMS technology is generally used in a broader sense, including the technologies of materials and processes required to make MEMS components, integration of components to make MEMS devices (sensors, actuators, etc) and applications that use MEMS devices. In addition, other microsystems such as microchemical reactors, microthermal systems and “smart materials” are also usually included by virtue of their utility as sensors, power sources, heat sinks, etc for MEMS.
In the civilian and commercial arenas, MEMS devices offer many advantages in applications such as automotive control and safety systems, communication, satellite control, medical devices and health monitoring. In 1997, there were some 80 US companies in the MEMS field with a world market for MEMS of US$2 billion, forecast to rise to over US$8 billion by 2003.
For defence, MEMS technology promises to deliver major advances in many diverse areas such as munition guidance, information gathering and soldier survivability. Most civilian or commercial applications will also find applicability in defence, either directly or through procurement of Commercial-Off-The-Shelf (COTS) equipment. In the United States of America, the Defense Advanced Research Projects Agency (DARPA) funds a large amount of research with possible applications to defence. DARPA funding for MEMS and integrated microsystems technology is currently around US$75M/yr, although this is expected to decrease dramatically to around US$37M/yr for the US financial years 2001 and 2002, and to around US$24M/yr for FY2003 and FY2004.
MEMS devices, such as accelerometers, are now available and are becoming more prevalent everyday. Consequently, it is necessary for DSTO to be aware of the state of the art and to be ready to take full advantage of their capabilities for the Australian Defence Organisation. This document aims to indicate the present state of MEMS technology by briefly discussing some of the publicly available current research. Emphasis is given to those aspects of MEMS technology directed towards potential defence applications. This survey was undertaken as a prelude to a more focussed study addressing applications of MEMS in rocket propulsion systems, which will be discussed in a subsequent publication. |
| Appears in Collections: | DSTO Formal Reports
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